| abstract |
In the present invention, a cyclone is provided in a truncated cone shape, and a pipe for providing a passage for transferring the aluminum nitride nano powder to the collecting portion is vertically formed in the center portion of the cyclone, and the outer wall of the pipe, And the distance between the inner walls decreases from the upper portion of the cyclone to the lower portion thereof. According to the present invention, the aluminum source material and the nitrogen source gas are pyrolyzed by plasma, and the aluminum (Al) and nitrogen (N) components are reacted to form nucleation and grain growth to produce high purity aluminum nitride It can be synthesized and collected efficiently. |