| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0de73168fb4fc587cc0632e1cb8a76ee |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67259
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05B7-0416
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05B1-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6715
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67017 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05B12-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate |
2012-09-21^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fb0fa09610faeb1f91ff5e32cc0bc49d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8200259eeda20f08674053c2db8c97bb |
| publicationDate |
2014-03-31^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20140038753-A |
| titleOfInvention |
Multiphase Fluid Injector |
| abstract |
The present invention relates to a multi-phase fluid injector, the present invention comprises an injection unit for injecting a fluid on the wafer; A steam supply unit connected to the injection unit to supply steam; A compressed dry air supply unit connected to the injection unit and supplying compressed dry air; And a pure water supply unit connected to the injection unit to supply pure water, wherein the injection unit injects a multiphase fluid mixed with steam, compressed air, and pure water. According to the present invention, the wafer is cleaned without using cleaning liquids such as alkaline cleaning liquids and acidic cleaning liquids which are environmental pollutants. In addition, the present invention not only speeds up the cleaning of the wafer but also uniformly cleans the wafer to increase the degree of cleaning. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180111382-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109772783-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180099024-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190004451-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190055866-A |
| priorityDate |
2012-09-21^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |