| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4bf29893a376fd8d96dc9d673c7d9187 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32201
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32229
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32311
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-4622 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 |
| filingDate |
2013-01-16^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_384d20d6b3cc16f3c711568675fe7eed |
| publicationDate |
2014-07-24^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20140092609-A |
| titleOfInvention |
Microwave plasma reactor |
| abstract |
There is disclosed a microwave plasma reactor including a microwave generating unit for generating a microwave, a waveguide connected to the microwave generating unit to receive and output the generated microwave, and a reaction unit for generating plasma from the reaction gas by the output microwave . |
| priorityDate |
2013-01-16^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |