| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2a3bb4ae410da4be8184239adc5ab1c0 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B63-845
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N70-8833
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N70-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N70-023
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N70-823 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8247
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 |
| filingDate |
2014-04-25^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_07f6ed8ccc9497566c5c1fdb0c168556
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_40df519406a4790c8808e930732e011d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d34de2ca6ba93d2956b1cf7c472b2859
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d9f205e17c00f950ba36f7eb81671c1a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_66471eceaf3ad9491dbd81535257b6a6 |
| publicationDate |
2014-11-06^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20140128876-A |
| titleOfInvention |
Method of making a resistive random access memory device |
| abstract |
A method of forming a resistive random access memory (RRAM) device is disclosed. The method includes forming a first electrode, forming a resistive switching oxide layer comprising a metal oxide by thermal atomic layer deposition (ALD), and forming a second electrode by thermal atomic layer deposition (ALD) Wherein a resistive switching layer is interposed between the first electrode and the second electrode. The step of forming the resistive switching oxide can be performed without exposing the surface of the switching oxide layer to the surface-depletion plasma treatment after depositing the metal oxide. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2021206908-A1 |
| priorityDate |
2013-04-29^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |