| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d3082cd39bb800686b9abbb8aa05c80b |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-24 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-04 |
| filingDate |
2013-04-04^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_37a643085ec669c74ed2c5f562d2112e |
| publicationDate |
2014-12-18^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20140144291-A |
| titleOfInvention |
Polishing pad with light-stable light-transmitting region |
| abstract |
The present invention provides a polishing pad comprising at least one light-transmitting region and optionally a polishing pad body. Wherein said light-transmitting region comprises a material comprising (a) a polymeric resin and (b) at least one light-absorbing compound, said light-transmitting region having a light transmittance of at least 25% at one or more wavelengths in the range of 250 nm to 395 nm Total light transmittance. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111183003-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I808485-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20220033666-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019031788-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20210021056-A |
| priorityDate |
2012-04-11^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |