http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20150035624-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32134 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-45 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-4908 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-136286 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-136 |
| filingDate | 2013-09-27^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2015-04-07^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20150035624-A |
| titleOfInvention | Manufacturing method of an array substrate for liquid crystal display |
| abstract | The present invention provides a method of manufacturing a semiconductor device, comprising: a) forming a gate wiring on a substrate; b) forming a gate insulating layer on the substrate including the gate wiring; c) forming a semiconductor layer on the gate insulating layer; d) forming source and drain electrodes on the semiconductor layer; And e) forming a pixel electrode connected to the drain electrode, wherein the step a) or the step d) includes forming a copper-based metal film on the substrate or the semiconductor layer, Etching the copper-based metal film with an etchant composition to form gate wirings or source and drain electrodes; Wherein the etchant composition is a copper-based metal film etchant composition comprising water in a residual amount such that hydrogen peroxide is 15 to 25 wt%, phosphorous acid is 0.3 to 5 wt%, and the total weight of the composition is 100 wt% based on the total weight of the composition. And a method of manufacturing an array substrate for a display device. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180009687-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180110483-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20170047952-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180110761-A |
| priorityDate | 2013-09-27^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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