abstract |
The present invention provides a buried word line and a semiconductor device using the same and a method of manufacturing the same. The semiconductor device according to the present invention includes a semiconductor substrate having a trench, a gate insulating film located on a bottom surface and a side wall of the trench, A first gate located above the gate insulating film, a second gate located above the first gate, and a multi-film located between the gate insulating film and the second gate. |