| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0acd20e3c3819b795fa3d905e7bfd096 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29K2075-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29L2031-736
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29L2009-00 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24D5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24D18-0009
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C39-123
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-20 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24D5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C39-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24D18-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-26 |
| filingDate |
2012-05-16^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f08871a5d413b0c14a3991d29d5f54d1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_57f9a35061c48a2168e89e98e20a06da
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_78d01e7c62f597367ea9f7304b57179a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_51c08c165427a55274fe70d2c6af6926
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9b59dd1ab443d6f704fcdb8b5304d572
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d0a9cb72328b3102cc2114ba1b21b917 |
| publicationDate |
2015-11-02^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20150122806-A |
| titleOfInvention |
Polishing pad with homogeneous body having discrete protrusions thereon |
| abstract |
Polishing pads are described that have uniform features with separate protrusions thereon. In one example, a polishing pad for polishing a substrate includes a uniform body having a polishing surface and a back surface. The uniform body is made of a material having a first hardness. The plurality of separated protrusions are disposed on the uniform polishing surface and are covalently bonded to the polishing surface. The plurality of discrete protrusions are made of a material having a second hardness different from the first hardness. A method of manufacturing polishing pads with a polishing body having separated protrusions thereon is also described. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3797015-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20170030537-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112384330-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112384330-A |
| priorityDate |
2011-05-23^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |