abstract |
There is provided a wiring structure for a display device which does not generate hillock even when exposed at a high temperature of about 450 to 600 占 폚, has excellent high-temperature heat resistance, suppresses electric resistance (wiring resistance) of the wiring structure as a whole, . The wiring structure for a display device according to the present invention comprises at least one kind selected from the group consisting of Ta, Nb, Re, Zr, W, Mo, V, Hf, Ti, Cr and Pt A first layer of an Al alloy containing an element and at least one rare earth element; A second layer of a nitride of an Al alloy or a nitride of an Al alloy selected from the group consisting of Ti, Mo, Al, Ta, Nb, Re, Zr, W, V, Hf and Cr Structure. |