http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20160097201-A

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_62fdba7df52864f2aeb98ddce78d9a12
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0206
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02063
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02052
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02046
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02071
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0047
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-0073
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D11-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-10
filingDate 2014-12-09^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fb648177411b049feeba1ad99c210d0a
publicationDate 2016-08-17^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20160097201-A
titleOfInvention Cleaning formulation for removing residues on surfaces
abstract 1) HF; 2) substituted or unsubstituted boric acid; 3) ammonium sulfate; 4) one or more metal corrosion inhibitors; 5) water; And 6) optionally, at least one pH adjusting agent, wherein the pH adjusting agent is a base that does not contain metal ions. The present invention also relates to a method of cleaning a semiconductor substrate using the composition.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020130266-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113195699-A
priorityDate 2013-12-11^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2013101907-A1
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421061643
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID447653313
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID19076166
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID431850561
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID423104794
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23134832
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450051340
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID424515659
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414003248
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419521903
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID416031715
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454634982
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415831110
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449447795
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID412753460
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID54189096
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415776239
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2723671
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID76349
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID423089280
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451105532
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID20772971
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID75771
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11065340
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID447827115
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID74601
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID54226311
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID66647287
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID25251
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420229894
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID17843933
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422610334
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID158551989
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415735026
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID20586
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12043351
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID87258382
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID424631814
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11600682
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID76844
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID28118
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID423070516
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454643312
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14818512
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414870334
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410551627
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5257871
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425348537
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID223
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450253361
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6400965
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12133
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449996336
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420231620
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7628
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID57476649
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411293575
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID66827
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID286947
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419549087
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450647129
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID119717
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453323429
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID498427
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415749369
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426865662
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450312855
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21395479
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24538
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512635
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID61491
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419578842
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559091
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415861834
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426101907
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22145191
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID412213012
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6509
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21707868
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID72157
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5460515
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID18373966
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3506624
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID586225
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID166520
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11487124
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID26255
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14178740
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12262517
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426246864
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22472129
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453137683
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410473312
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID166805
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419546884
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448129216
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9964072
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12430
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415750459
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450664886
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID19389429
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454470200
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID468172510
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426241309
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415860909
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5413
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID427880607
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421469065
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID413288435
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID962
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419490211
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410500956
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426101192
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID82895
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453265332
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID423461045
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21917580
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12025426
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22149663
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13862916
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID409741403
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID20467
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448708622
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23323392
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419698070
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID423465644
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID118023517
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9920739
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451486588
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6379
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21707869
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID61301
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID17337
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID54154725
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6416367
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559564
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID597467
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2723869
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID135420616
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8705
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID20043962
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID413671473
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID409782073
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414809098
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID424429504
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID18317173
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID80533
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6380
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419519801
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422859291
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22974751
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458427722
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID169042
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415729747
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID31294
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415819959
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID447617051
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID66854
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421121335
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID67811690
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449399231
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23665710
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453284053
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425987087
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID17763402
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID136048
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414864024
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID416024424
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451403949
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458397310
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415822339
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422936700
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448786743
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID122499
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID427763905
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID72917
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451710367
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID66760
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22049664
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454377014
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457522789

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