| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1e625fb5dd6750a6d38fd6ced5726120 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2021-60187
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02C20-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2258-0216
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P70-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01009 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D35-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02046
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C02F1-001
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D46-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67034
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-8659
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-306 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D46-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D35-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-86
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C02F1-00 |
| filingDate |
2015-11-06^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f366664d24b8ee791d0ed2b0f7336ce0 |
| publicationDate |
2017-05-16^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20170053406-A |
| titleOfInvention |
Apparatus and method for treating waste gas by catalyst |
| abstract |
The present invention relates to a pretreatment unit for a waste gas which is a mixture of a perfluorinated compound and an acidic gas and which has a double pipe structure in which acid gas is firstly treated in the waste gas and a catalytic treatment for treating a perfluorinated compound of waste gas passing through the pretreatment unit And a post-treatment unit for treating the acidic gas remaining in the waste gas passing through the unit and the catalytic treatment unit to improve the removal performance of the acidic gas to prevent damage to the facility and to remove the perfluorinated compound more efficiently And a catalytic waste gas treating apparatus and method. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108744958-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108744958-A |
| priorityDate |
2015-11-06^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |