| abstract |
The present invention relates to a method of manufacturing a metal-oxide-ceramic composite material, wherein ceramic is a matrix, nano-carbon coated with a metal oxide is dispersed in the matrix, and the metal oxide comprises at least one material selected from the group consisting of MgO and ZrO 2 , Wherein the ceramic comprises at least one material selected from the group consisting of Al 2 O 3 , ZrO 2 , AlN, SiC and Si 3 N 4, and a process for producing the same . According to the ceramic-nano-carbon composite of the present invention, since the plasma oxide is coated on the surface of the nano-carbon which is excellent in conductivity but is vulnerable to a plasma environment, it has plasma resistance and conductivity. |