http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200030628-A

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filingDate 2018-08-06^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bbe6d4aeb68a518f0a7ef29b2a21c920
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publicationDate 2020-03-20^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20200030628-A
titleOfInvention Self-aligned high aspect ratio structures and fabrication methods
abstract Processing methods for forming self-aligned high aspect ratio features are described. These methods include depositing a metal film on a structured substrate, volume expanding a metal film, depositing a second film between the expanded pillars, and optionally recessing the pillars, and forming high aspect ratio features. And repeating the process to do so.
priorityDate 2017-08-13^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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