http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200066156-A

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0335
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02164
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02274
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0217
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0228
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67103
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02063
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31144
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0337
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-324
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-324
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311
filingDate 2019-09-11^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d57e6054a935130e0623181c152eed97
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1ebdfbf7429253fcf1ed46261652387c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0bba7613c31bf8577906596a1105d313
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9386220136e100d276c534a0b0c3ced5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f07d38277837556d07b38971cd52e4bf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ec0c7639355d2fe1a5a21a9b76c97373
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_35dd8d4c5b1ad6b0cc60b820c87def93
publicationDate 2020-06-09^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20200066156-A
titleOfInvention Substrate processing method
abstract [Problem] A technique for controlling a pattern formed on a substrate to a desired state is provided. [Solutions] The substrate processing method includes a step of providing a substrate to be processed having a pattern, a step of depositing a film on the substrate, a step of forming a reaction layer by plasma on the surface of the substrate, and energy of the substrate. And removing the reaction layer.
priorityDate 2018-11-30^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010165954-A
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559541
http://rdf.ncbi.nlm.nih.gov/pubchem/anatomy/ANATOMYID1969
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID28145
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449787175
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5461123

Showing number of triples: 1 to 37 of 37.