| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3577aabfd75e2433ded3fe015c228cb5 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-124
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-125
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-14 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-14 |
| filingDate |
2019-10-28^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_070cfdff59645e2139412fb27a0dd3fe
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1e6ac50462e007d11900b1b648d8130c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_41796f564b4ada3c1f1825f0749e1857
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a8d48bd81ef1da1f5968a9b3013ad20b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_65d5317739184b5626b072aeee56e382
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b1a6e587d823e43eca3c54d4d2789138 |
| publicationDate |
2021-05-07^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20210050282-A |
| titleOfInvention |
GaN based Gas Detector Combined Heater and Method for Manufacturing the Same |
| abstract |
The disclosed gallium nitride-based heater-integrated semiconductor gas sensor includes: a substrate; A semiconductor heater formed on the upper side of the substrate and having a two dimensional electron gas layer (2DEG) structure by heterojunction, comprising: a heating unit that is heated by a current flowing through the 2DEG layer to generate heat; A heating electrode unit supplying the current to the heating unit; A semiconductor gas sensor formed above the heating unit and configured to generate a sensing current in response to a detection target gas, wherein the sensing unit increases reactivity to the detection target gas by the heat generated by the heating unit; And a sensing electrode part through which the sensing current flows. |
| priorityDate |
2019-10-28^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |