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publicationDate 2021-10-27^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20210129081-A
titleOfInvention Apparatus for manufacturing fine particles and method for manufacturing fine particles
abstract Provided are an apparatus for producing microparticles and a method for producing microparticles that can control the particle size of microparticles and can efficiently (with high efficiency) mass-produce microparticles with good particle size uniformity. The apparatus for producing fine particles includes a raw material supply unit for supplying a raw material for manufacturing fine particles into a thermal plasma flame, a thermal plasma flame is generated therein, and a plasma that evaporates the raw material supplied by the raw material supply unit with a thermal plasma flame to obtain a gaseous mixture It has a torch and a plasma generating part for generating a thermal plasma flame inside the plasma torch. The plasma generating unit includes a first coil surrounding the plasma torch, a second coil provided below the first coil and surrounding the plasma torch, and a first coil for supplying a high-frequency current to the first coil A first power supply unit and a second power supply unit supplying amplitude-modulated high-frequency current to the second coil are provided, and the first coil and the second coil are arranged side by side in the longitudinal direction of the plasma torch.
priorityDate 2019-03-01^^<http://www.w3.org/2001/XMLSchema#date>
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