| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_421cadb30fc0074fe61126eb980d19d6 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-24495
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-24485
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2817
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2443
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2448 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-222
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-05
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-22 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-05 |
| filingDate |
2020-10-06^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_73134a5c09ff5eda4d66abd059f7261e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fa06899a5161faa19330a5316925eb07
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8ca568f454e8cd2178aae4be75832461
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_db414554085e312078cd4acdf41a3905
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cb1cdcdff5e70f49f816de7402105672 |
| publicationDate |
2022-05-12^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20220061215-A |
| titleOfInvention |
charged particle beam device |
| abstract |
The charged particle beam device 1 includes a plurality of detectors 7 for detecting signal particles 9 emitted from a sample 8 by irradiation with a charged particle beam 3 and converting them into an output electrical signal 17 ; , installed for each detector 7, an energy discriminator 14 that discriminates the output electrical signal 17 according to the energy of the signal particle 9, and the energy discrimination condition of each energy discriminator 14 is set A discrimination control block 21 and an image arithmetic block 22 for generating an image based on the discriminated electric signal are provided. The discrimination control block 21 sets different energy discrimination conditions among the plurality of energy discriminators 14 . |
| priorityDate |
2019-10-31^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |