| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2201-3425
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-31779 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3175
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J1-34 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J1-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-317
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 |
| filingDate |
1988-12-15^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
1989-08-09^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-890010605-A |
| titleOfInvention |
Optoelectronic mask and photoelectric transfer exposure method using the same |
| abstract |
No content |
| priorityDate |
1987-12-15^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |