| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_664f5b543543aac4cf0153a4ef4e0f85 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-0815
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E60-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-006
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-31701
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-3365
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-0473 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J27-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3171
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32807
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32458
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B3-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-317 |
| filingDate |
2015-03-03^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7a6a7fd1dba15b5fbef8e0147f49ffca
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4de4267d3da1ea453774f139f4022baf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_354e3b1f687cf2af1643dd58f19f2c24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_df5cb96e164fcd8813cfcbebf8d34a08 |
| publicationDate |
2016-09-29^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
SG-11201606358X-A |
| titleOfInvention |
Boron-containing dopant compositions, systems and methods of use thereof for improving ion beam current and performance during boron ion implantation |
| priorityDate |
2014-03-03^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |