| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D183-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D183-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02216
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02348
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01B3-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3122 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-00 |
| filingDate |
2007-02-02^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_78462668f9efb0980c97419f0467c85d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eb0045d24003e2a9c6df126e51068ac8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4fa294e0d06fc662543460e42ed5c639
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d5788eb47c649c7d10534ceed94ff9cc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_92fc605b2e3b56d292a0e3edd1c387a1 |
| publicationDate |
2008-02-01^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-200806714-A |
| titleOfInvention |
Organic silica film and method for forming the same, composition for forming insulating film of semiconductor device and method for producing the same, wiring structure and semiconductor device |
| abstract |
Disclosed is a composition for forming an insulating film of semiconductor devices, which contains an organic silica sol having a carbon atom content of 11-17% by atom, and an organic solvent. The organic silica sol contains a hydrolysis-condensation product P1 and another hydrolysis-condensation product P2. The hydrolysis-condensation product P1 is obtained by hydrolyzing and condensing a hydrolyzable group-containing silane monomer (A) and a polycarbosilane (B) having a hydrolyzable group in the presence of a basic catalyst (C), while the hydrolysis-condensation product P2 is obtained by hydrolyzing and condensing a hydrolyzable group-containing silane monomer (D). |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I680945-B |
| priorityDate |
2006-02-02^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |