| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ac39f2b350f9ca20552b16c240220b8b |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-0455
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-31703
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-0044
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-30477
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-0492
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-057
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-047 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-05
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-26513
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-26566
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G21K5-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3171 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J33-02 |
| filingDate |
2007-06-13^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9708fb0bfb203bba90c75abaed8adb90
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_320cf2a8d71831915e0fcdb842cde75c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f8b52c7d2f3cbabf5face1b8a8eaacd3 |
| publicationDate |
2008-04-01^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-200816255-A |
| titleOfInvention |
Ion beam apparatus for ion implantation |
| abstract |
A multipurpose ion implanter beam line configuration constructed for enabling implantation of common monatomic dopant ion species and cluster ions, the beam line configuration having a mass analyzer magnet defining a pole gap of substantial width between ferromagnetic poles of the magnet and a mass selection aperture, the analyzer magnet sized to accept an ion beam from a slot-form ion source extraction aperture of at least about 80 mm height and at least about 7 mm width, and to produce dispersion at the mass selection aperture in a plane corresponding to the width of the beam, the mass selection aperture capable of being set to a mass-selection width sized to select a beam of the cluster ions of the same dopant species but incrementally differing molecular weights, the mass selection aperture also capable of being set to a substantially narrower mass-selection width and the analyzer magnet having a resolution at the mass selection aperture sufficient to enable selection of a beam of monatomic dopant ions of substantially a single atomic or molecular weight. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I514558-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I797135-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I761462-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I760637-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I795448-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I626675-B |
| priorityDate |
2006-06-13^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |