http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-200908076-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bd3db587e4ed4157681e419a4f7741e8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_82cbc291d77c061ac9a216f86ec010a3 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32238 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32192 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3222 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32229 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| filingDate | 2008-06-11^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2ca7d6610ea22af1124482f136f7c9a0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2dd8e1a5c119e21157c04b30082befed |
| publicationDate | 2009-02-16^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-200908076-A |
| titleOfInvention | Plasma processing system and use of plasma processing system |
| abstract | To provide a plasma processing apparatus for which a low frequency electromagnetic wave can be used. A plasma processing apparatus (10) is provided with a processing container (100); a microwave source (900) for outputting a microwave; an internal conductor (315a) for transmitting the microwave outputted from the microwave source (900), and a dielectric plate (305) adjacent to or in proximity to the internal conductor (315a) for transmitting the microwave transmitted through the internal conductor (315a) and outputs the microwave into the processing container (100); and a propagation disturbing section ( for instance, a groove (300a)) arranged on the inner surface of the processing container (100). A process window can be widened by supplying the plasma processing apparatus (10) with a low frequency microwave. |
| priorityDate | 2007-06-11^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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