http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201043717-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_af3ec0d5706877e6ffae86cbd7b4be51 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-54 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-52 |
| filingDate | 2009-06-11^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4dfd607db228422ca25416b9cfc6b8f9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c21983070e4b38a4ffeafe5e7473ebb5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2c5014f105288a5e8ce9af68ecf19bf2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1252c06419821e5eea08c3f30998039c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_34283227ab39ec1b4e7e3249b441c45f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_48bc5331a8f66dc7ccfb4665b63c3f40 |
| publicationDate | 2010-12-16^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201043717-A |
| titleOfInvention | External inspection apparatus and sputtering apparatus for preventing influencing of coating |
| abstract | An external inspection apparatus for preventing influencing of coating disposed at two pairing glass windows of a chamber of a sputtering apparatus comprises a transmitter and a receiver respectively configured at an external of the chamber and corresponding to the locations of the glass windows. The glass windows include two coating prevention tubes configured inside the chamber and for respectively shielding the two glass windows. The transmitter emits an output light into the chamber and reach the receiver through the two coating prevention tubes, The coating prevention tubes can provide effective shielding for the glass windows during the sputtering process in the sputtering apparatus so that material particles may not be coated on the glass windows to improve the utilization convenience of the sputtering apparatus and reduce maintenance costs. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I706498-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I665326-B |
| priorityDate | 2009-06-11^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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