http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201138562-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ebaa1f429e582e0c2ef77ec04468da13 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32229 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32678 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 |
| filingDate | 2010-12-08^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_24fe53224bbe4574db9a38c142c68de2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9d82973692f640468ce5f12820f21fcc |
| publicationDate | 2011-11-01^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201138562-A |
| titleOfInvention | ECR-plasma source having a protective coating and method for using the protective coating |
| abstract | The invention relates to an Electron Cyclotron Resonance (ECR) plasma source consisting of a housing, a wave distributor (12) and between the housing and the wave distributor (12) a protective coating (7). According to the invention is the protective coating (7) of an organic or mineral fiber material. The fiber material may be a fabric of fiber or filt made of basalt, carbon, or aluminum oxide and the plasma facing surface area of the protective coating (7), has at least partially have an open weave structure. The protective coating can be used to cover all surfaces which are exposed to a plasma or a plasma process and shall not be coated. |
| priorityDate | 2009-12-09^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Showing number of triples: 1 to 20 of 20.