| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T156-19
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T156-1111
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T156-1116
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2221-68381
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2221-68327 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02057
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D9-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-5027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6835 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67 |
| filingDate |
2011-03-30^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eaf8739795bdf2e93563d762937aa2c3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8dc2721dc8687dbbd3a5560e159ecc50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c87d1be7f6575f575cdde51e7973f5cb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a94ad2454631c4e26d3471c10e56b9e3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d986044d0f10544813c345d2954db4c3 |
| publicationDate |
2012-03-16^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201212112-A |
| titleOfInvention |
Separating method and separating agent |
| abstract |
In order to provide a stripping method for stripping a supporting plate from a substrate in a short time easily, a method according to the present invention is a method for stripping a wafer from a supporting plate to which the wafer is adhered via an adhesive agent, and which supporting plate has a through hole penetrating the supporting plate in a thickness direction of the supporting plate, and includes: dissolving the adhesive agent with a stripping solution, by contacting the stripping solution to the adhesive agent via the through hole. The adhesive agent has a hydrocarbon resin as a viscous component, and the stripping solution is a hydrocarbon-based solvent having a viscosity of 1.3 mPa.s or less and a dissolving rate of 30 nm/sec or greater to dissolve the adhesive agent. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10580640-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I683878-B |
| priorityDate |
2010-04-02^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |