http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201348863-A

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filingDate 2013-03-20^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c9a01c739742fc2d4ce02c9705ce4d67
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3d6af8dd7c0cc87e9165369a4681065f
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publicationDate 2013-12-01^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-201348863-A
titleOfInvention Photosensitive ray- or radiation-sensitive resin composition, resist film using the same, pattern forming method, electronic component manufacturing method, and electronic component
abstract Provided is a photosensitive ray-sensitive or radiation-sensitive resin composition comprising: a resin (P) having a repeating unit represented by the following formula (A) and having a repeating unit represented by the following formula (B) At least two of the repeating unit represented by the following formula (C), the repeating unit represented by the following formula (D), and the repeating unit represented by the following formula (E). □□□□□
priorityDate 2012-03-21^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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