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publicationDate 2016-05-01^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-201615389-A
titleOfInvention Print chemical mechanical polishing pad
abstract A method of manufacturing an abrasive layer of a polishing pad, sequentially depositing a plurality of layers by a 3D printer, by ejecting a base material from a first nozzle and ejecting an additive material from a second nozzle and curing the base material and the additive material to form a cured Each of the plurality of abrasive layers is deposited by a pad material.
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