| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_dca153f19868f747eeea612b047a9e7c |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06F2203-04103 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05C5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05C5-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J11-008
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06F3-041
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-01
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05C11-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J29-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2018 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05B13-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-14 |
| filingDate |
2017-08-07^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3234d039ab6e35b3cc07fa9d3bb07fc9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7e68f8df261f57709240c74657d7ac2c |
| publicationDate |
2018-02-16^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201805069-A |
| titleOfInvention |
Film forming method and film forming device |
| abstract |
The present invention provides a film formation method capable of forming edges with minimum dimensions in a pattern by using inkjet printing technology with high precision. While the substrate is relatively moved with respect to the inkjet head, droplets are ejected from the inkjet head to the substrate based on pattern data defining a pattern of a film to be formed to form a film on the substrate. The relative movement direction of the inkjet head and the substrate is orthogonal to the direction of the minimum size of the pattern defined by the pattern data. |
| priorityDate |
2016-08-10^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |