| abstract |
A coating liquid for forming an oxide or oxynitride insulator film, comprising at least one of an A element, a B element, and a C element, and a solvent; the A element is selected from the group consisting of Sc, Y, and Ln ( Lanthanide), Sb, Bi, and Te; at least one member selected from the group consisting of Ga, Ti, Zr, and Hf; and the C member selected from the group consisting of periodic At least one of the group consisting of Group 2 elements in the table; the solvent is at least one selected from the group consisting of an organic solvent containing a flash point of 21 ° C or higher and less than 200 ° C and water. |