| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fc29036b67a4fda397921268d930de86 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C8-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C8-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C8-14 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B65D6-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B21C27-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B13-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C8-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F16L58-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-448 |
| filingDate |
2018-08-08^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f8b05046c9ec1026d19b6c1adf0f2cc0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_42215631acc67c34ac1c491e0d030bac
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_621f0c8d242f2a19a3ae8f201a46228c |
| publicationDate |
2019-07-01^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201925497-A |
| titleOfInvention |
Processing method of inner wall surface of object to be processed |
| abstract |
The invention provides a method for processing the inner wall surface of an object to be processed, which is a container for containing ozone gas and the inner wall is made of metal, and a container for containing surface treatment with ozone gas and the inner wall is made of metal (30 ), And at least any one of the pipes that supply ozone gas and whose inner wall is made of metal is the object to be processed, and processes the inner wall surface of the object to be processed. The processing method of the inner wall surface of the processed object includes the following steps: confirming whether there is an abnormal part in the inner wall surface of the processed object; Ozone gas having a concentration of 10% by volume or more and 30% by volume or less and a temperature of 60 ° C or less is circulated. |
| priorityDate |
2017-11-30^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |