| abstract |
The present invention relates to an apparatus (2400, 2600) for examining and/or processing a sample (400, 2010), said apparatus comprising: (a) a scanning particle microscope (2410) for providing a beam of charged particles (840), which can be directed on a surface of the sample (400, 2010); and (b) a scanning probe microscope (2470) with a deflectable probe (200, 500, 800, 900, 1000, 1100, 1200, 1300, 1500, 1600, 1640, 1670, 2600); (c) wherein a detection structure (230, 530, 1030, 1130, 1330, 1530, 1630, 1690, 2630) is attached to the deflectable probe (200, 500, 800, 900, 1000, 1100, 1200, 1300, 1500, 1600, 1640, 1670, 2600). |