http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-202012464-A

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filingDate 2019-07-24^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a9163d5763457518986267c7f5364aae
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_53f8d37c8765efabbf0d03b006fec6f3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f1704a587e8d201d14da6bed34410f09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_faba893318dcdb0cd5f1a3961c35ae8c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_85e6160cb29ccb2a7e049f6c42d93ca9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0d04851b6d5bd7c7afe92b254f633b84
publicationDate 2020-04-01^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-202012464-A
titleOfInvention Photosensitive resin composition, method for forming resist pattern, method for manufacturing plated molding, and semiconductor device
abstract An object of the present invention is to provide a photosensitive resin composition for forming a resist pattern useful as a mask for plating treatment, a method for forming a resist pattern using the photosensitive resin composition, and a A method for manufacturing a plated molded product of a resist pattern formed by the forming method, and a semiconductor device having the plated molded product, the photosensitive resin composition contains: a polymer (A), having the following formula The structural unit (a1) represented by (a1), the structural unit (a2) represented by the following formula (a2), and the structural unit (a3) represented by the following formula (a3); and the photoacid generator (B ). In formula (a3), R 33 represents a hydroxyaryl group.
priorityDate 2018-08-21^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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