http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-202015220-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_02d99acd0b92156c011c671a259f2295 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B43-27 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B43-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76224 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-11551 |
| filingDate | 2018-10-08^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_62c85461987ef6444ad6288861a3f6c8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e3e757531b9d1044119b5333d975fef6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3f27a3f296a5ea54be0ea041d8cdf067 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5566075f91aa23a2e76fa137c87de579 |
| publicationDate | 2020-04-16^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-202015220-A |
| titleOfInvention | Non-volatile memory structure and manufacturing method thereof |
| abstract | A manufacturing method of a non-volatile memory structure includes forming a bottle-shaped trench in a substrate, wherein the bottle-shaped trench has a neck portion adjacent to a surface of the substrate and a main body portion connecting the neck portion, a width of the neck portion is smaller than a width of the main body portion; performing a first ion implantation process to form a source region in the substrate at the bottom of the main body portion; forming a charge storage layer on the inner surface of the bottle-shaped trench; forming a bottle-shaped gate in the bottle-shaped trench; and performing a second ion implantation process to form a drain region in the substrate adjacent to the neck portion. |
| priorityDate | 2018-10-08^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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