Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1d29f7ac2c7f9be9f7dae1a83bbb5c92 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B55-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B27-0675 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B28D5-0082 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B27-0675 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B28D5-0076 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B27-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B28D1-003 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B28D5-007 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B55-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B28D5-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B28D5-022 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B28D7-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B28D1-121 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B27-0658 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B55-06 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-301 |
filingDate |
2020-04-30^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_46c8e35f59c844a129b8ba5b23c1d090 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_34ee0417469e2f52401778a21c64ae95 |
publicationDate |
2020-12-16^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
TW-202046429-A |
titleOfInvention |
Polycrystalline silicon rod cutting method, polycrystalline silicon rod cutting rod manufacturing method, polycrystalline silicon rod bulk crystal manufacturing method, and polycrystalline silicon rod cutting device |
abstract |
A method capable of preventing metal contamination during the cutting of polycrystalline silicon rods is realized. The cutting method of the polycrystalline silicon rod (S) includes: a cutting step of cutting the polycrystalline silicon rod (S) by a cutting tool (133); and in the cutting step, from the first nozzle (14) ) Supply the liquid (L1) to the cutting position of the polycrystalline silicon rod (S); and supply the liquid (L2) to the surface of the polycrystalline silicon rod (S) from the second nozzle (15). |
priorityDate |
2019-06-06^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |