| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_421cadb30fc0074fe61126eb980d19d6 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2817
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-24495
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2443
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2448
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-24485 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-05
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-222 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-28 |
| filingDate |
2020-10-19^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8ca568f454e8cd2178aae4be75832461
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fa06899a5161faa19330a5316925eb07
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cb1cdcdff5e70f49f816de7402105672
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_73134a5c09ff5eda4d66abd059f7261e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_db414554085e312078cd4acdf41a3905 |
| publicationDate |
2021-05-16^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-202119454-A |
| titleOfInvention |
Charged particle beam device |
| abstract |
Distinguish the energy of signal electrons in a short period of time to increase the output.nThe charged particle beam device (1) is provided with: a plurality of detectors (7), which detects the signal particles (9) emitted from the sample (8) by the irradiation of the charged particle beam (3) and converts them into output electronic signals (17) ); and the energy divider (14), which is set up for each detector (7), and differentiates the output electronic signal (17) in response to the energy of the signal particle (9); and divides the control block (21), and sets each The energy distinguishing condition of the energy distinguisher (14); and the image calculation block (22) to generate an image based on the distinguished electronic signal. The classification control block (21) sets different energy classification conditions among the plurality of energy classifiers (14). |
| priorityDate |
2019-10-31^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |