http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-202129079-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1d29f7ac2c7f9be9f7dae1a83bbb5c92 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32134 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30604 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3213 |
| filingDate | 2020-07-08^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8505e4b1993e25183870f36c1ee27cb6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e8239b8f20bb80385f3d8c257f24328f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_329005bfd234d28c972c80eb89689e59 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_207902c49bcb07a75b1726e3582f0280 |
| publicationDate | 2021-08-01^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-202129079-A |
| titleOfInvention | Ruthenium treatment liquid for semiconductor and its manufacturing method |
| abstract | Provided is a ruthenium semiconductor processing solution, which contains hypobromite ions. Furthermore, there is provided a ruthenium semiconductor treatment solution, which is obtained by adding and mixing at least a bromine-containing compound, an oxidizing agent, an alkali compound, and water. The amount of the bromine-containing compound added is 0.01% by mass based on the amount of the bromine element relative to the total mass. The above is less than 2% by mass, the addition amount of the aforementioned oxidizing agent is 0.1% by mass or more and 10% by mass or less, and the pH is 8 or more and 14 or less. Furthermore, there is provided a method for producing a ruthenium semiconductor processing solution, which has a step of mixing a solution containing a hypochlorous acid compound and an alkali compound and a bromine-containing compound. |
| priorityDate | 2019-09-27^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Showing number of triples: 1 to 231 of 231.