| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2cf14ca6fc2f4e3ed588ed3fde90bd90 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01F1-698
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01F15-022 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N33-0027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N25-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01F1-6845
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01F1-69
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01F1-7084
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01F1-6888
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-18 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01F1-7084
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01F1-684 |
| filingDate |
2020-10-21^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1f793c5b792dbb1c93640788f4ceb34d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_10d93bbddd2b0b87dceb2fb04bffacbf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c48776fac7d6e8920d0e6fb63dc6749c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_da2319179263c20a704d19a77b5a65e4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_81181a257b47a2917fa9059f44af6602 |
| publicationDate |
2021-09-16^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-202134605-A |
| titleOfInvention |
Thermal fluid flow sensor |
| abstract |
We disclose herein a flow and thermal conductivity sensor comprising a semiconductor substrate comprising an etched portion, a dielectric region located on the semiconductor substrate, wherein the dielectric region comprises at least one dielectric membrane located over the etched portion of the semiconductor substrate and a heating element located within the dielectric membrane. The dielectric membrane comprises one or more discontinuities located between the heating element and an edge of the dielectric membrane. |
| priorityDate |
2019-10-21^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |