| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_eb2648e65ad8850515bd727a122f1186 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02381
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02546
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02532
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-046
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0262
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B6-34 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D61-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B6-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B33-04 |
| filingDate |
1994-09-09^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1999-01-21^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0015d796252482abf0d2e1430fbdb372
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_98e6c024e2b3f497ac720c39c0ed6c14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0531d753091d7dcf69d5fd0d455abe4f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_524cc659c8f14d2224add05f71e210af |
| publicationDate |
1999-01-21^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-350787-B |
| titleOfInvention |
Process for the separation of a gaseous hydride or a mixture of gaseous hydrides with the aid of a membrane |
| abstract |
A process for separating silane from the first gaseous medium which contains at least one gas from the group consisting of H2, Ar or He by the following steps: (a) passing the silane-containing first gaseous medium onto a membrane module having at least one polyimide or polyaryl amide membrane; (b) the concentration of silane in the second gaseous medium recovered from the membrane module is higher than the initial concentration in the first gaseous medium. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I655964-B |
| priorityDate |
1993-09-17^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |