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publicationDate 2000-11-21^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-412845-B
titleOfInvention Semiconductor device having a fuse and a fabrication process thereof
abstract In a semiconductor device having a fuse and an etching stopper film covering the fuse, an optical window exposing the etching stopper film and a contact hole exposing a conductor pattern are formed simultaneously. By further conducting a dry etching process, the insulation film covering the fuse is exposed.
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