http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-428220-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c4aae5864c6876a44ebf635695101090 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F24F3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F24F3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F24F3-167 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G05D22-02 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G05D22-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F24F6-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F24F3-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F24F3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F24F3-14 |
| filingDate | 1999-10-13^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2001-04-01^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_84b809b8a0585395a8ebe75a553ab105 |
| publicationDate | 2001-04-01^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-428220-B |
| titleOfInvention | Temperature-humidity controller for semiconductor equipment and controlling method thereof |
| abstract | A temperature-humidity controller for a semiconductor equipment comprises a housing; an inlet pipe for introducing processing air, which has a discharging portion for flowing the air into an inner portion of the housing; a water supplying means for supplying water into the inner portion of the housing so as to contact with the processing air from the discharging portion of the inlet pipe thereby simultaneously performing dehumidifying and humidifying processes; a cooling means for cooling the water at a dew point; a heating means for heating the air at a desired temperature, which is dehumidified and humidified by the water supplying means; an outlet pipe for supplying the heated air to the semiconductor equipment. |
| priorityDate | 1999-06-29^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID962 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512635 |
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