http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-437030-B

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filingDate 2000-02-03^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2001-05-28^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8366b691b58d222eb4288d5235cee6ed
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publicationDate 2001-05-28^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-437030-B
titleOfInvention Bonding pad structure and method for making the same
abstract A bonding pad structure and a method for making the same can be applied on a substrate. The bonding pad structure comprises a metal bonding pad with a pattern on the surface thereof; a first passivation layer with an opening on the top of the metal bonding pad; and a second passivation layer located on the first passivation layer and with an opening on the top of the metal bonding pad. The method for making the bonding pad structure comprises the following steps: forming a metal bonding pad on a substrate; forming a first passivation layer on the substrate; patterning the first passivation layer on the metal bonding pad; using the first passivation layer as a mask to remove a portion of the exposed metal bonding pad; forming a patterned second passivation layer on the substrate, the opening of the second passivation layer is on top of the metal bonding pad; removing the first passivation layer remained on the metal bonding pad in order to fully expose the surface of the metal bonding pad.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110116984-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110116984-B
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102543921-B
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priorityDate 2000-02-03^^<http://www.w3.org/2001/XMLSchema#date>
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