http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-493053-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_950bce8d103dab1bd282965fde47f9f3 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3171 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-265 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16L51-025 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-16 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F16L51-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F16J3-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-265 |
| filingDate | 1999-12-15^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2002-07-01^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8240c1517c86a4146ada4ccfbf3c0681 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bc4e055e31c07e34b15892e024e5d9a9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b44079994d2ca7a00d7d70ec54d34d3f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e57c93dc1d99d626877b218483f30523 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8bfb08ad45f3f1a97decfe69d833f57d |
| publicationDate | 2002-07-01^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-493053-B |
| titleOfInvention | Lateral stress relief mechanism for vacuum bellows |
| abstract | An improved bellows assembly (18) is provided for use in, for example, an ion implanter (10). The bellows assembly comprises a first mounting portion (56) located at one end of the bellows assembly for fixedly mounting the bellows assembly to a first vacuum chamber (16); a second mounting portion (52) located at an opposite end of the bellows assembly for slidably mounting the bellows assembly to a second vacuum chamber (15); and a steel bellows (54) located between the first and second mounting portions. The bellows extends generally along a longitudinal axis (64) and is expansible and contractible along this axis. The second mounting portion permits radial slidable movement of the bellows assembly with respect to the second chamber in a first plane substantially perpendicular to this axis. The second mounting portion comprises at least one sliding seal subassembly (80) for maintaining the vacuum, and a support ring (78) and a slide plate (82) located on opposite ends of the sliding seal subassembly. The slide plate and the sliding seal subassembly provide a slidable vacuum-tight mating surface therebetween. |
| priorityDate | 1998-12-21^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
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