| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_242cc8d15c771395b920cc7de452da6a |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31663
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T279-23
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31938
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31721 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6833
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate |
2002-04-16^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2003-07-01^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3016152bf0020c4079852767aefa32b9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b10ecc75e2b6927fce150102b96564cd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_731fdaa2e566730fa214f85b4869dd91
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f553750ea243c82126ec157f4b9e0cd4 |
| publicationDate |
2003-07-01^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-540129-B |
| titleOfInvention |
An electrostatic adsorption device |
| abstract |
An electrostatic adsorption device 1B has a dielectric layer 2, electrodes 4A and 4B, a cooling member 5 and an insulating adhesive 3. The dielectric layer 2 is made of a ceramic dielectric material and has an adsorption face and a back face. The electrodes 4A and 4B are provided on the back face 2b of the dielectric layer 2. The electrodes 4A and 4B define gaps 10. The insulating adhesive 3 is provided between the back face 2b of the dielectric layer 2 and the cooling member 5. The insulating adhesive 3 covers the electrodes 4A and 4B and the back face 2b and is provided in the gap 10. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I552261-B |
| priorityDate |
2001-06-06^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |