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filingDate 2001-12-20^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2003-10-01^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-555691-B
titleOfInvention Aqueous dispersion, a process for the preparation and the use thereof
abstract Aqueous dispersion, containing a silica produced by pyrogenic means and alkali-doped by means of aerosol, wherein the average particle size in the dispersion is less than 100 nm. It is used for polishing surfaces (CMP).
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