| abstract |
This invention proposes a method of manufacturing high-temperature sensor with metal/ceramic joint. The joint is featured with long-time resistance to high temperature, high cycle fatigue, thermal cycles and high reliability. The steps include a hole formed in the joint location on the ceramic substrate, making the bonding layer at least formed on both the inner surface and circumferential portion of the hole on the ceramic substrate, depositing the supportive metal into the hole of above substrate, making the conductive layer on the above surface of the joint, the joint covered by the metal signal conduction wire, and finally welding spots formed in the joint by welding process. High temperature sensors made by this method can be used in the environment of high temperatures, vibrations and thermal cycles. |