http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I227377-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_03d0f52bb4069f8a19d70dcfb697c67a |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-106 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039 |
| classificationIPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
| filingDate | 2000-10-05^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2005-02-01^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_abf92c6162f276a54a5782dd87f205c1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_601ba4a71019c4ad5d4dff3748ba6624 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4777e38204f9f24001cd48b964f0099c |
| publicationDate | 2005-02-01^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-I227377-B |
| titleOfInvention | Positive-type resist composition |
| abstract | Provided is a chemical amplified positive-type resist composition having high sensitivity, improved etch roughness, and excellent profile of resist pattern. Provided is a positive-type resist pattern comprising a specific alicyclic hydrocarbon which contains at least one protected alkali soluble group in part of the structure thereof, or (C) a resin having specific cyclic structure in the main chain and the content of monomer which corresponds the repeating structural unit constituting the resin being 5% or less of the total surface area of the pattern measured by GPC and the dissolving speed of it in an alkali developing solution is increased by the action of an acid, and (B) a compound which generates acid by the irradiation of active light or radiation. |
| priorityDate | 1999-10-06^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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