| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_424db9d56b06a23aed410fcf5df652f3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76808 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-094
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D183-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31144
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0752 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B44C1-22 |
| filingDate |
2005-06-08^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2010-11-01^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_83de68a158a2dc04d639c8a225fe35f4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_65bf3b18f45bad88cdb7dda49c3361e9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d900ef70817c8e98f90830ba214bf60f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_05896043998b09682cd832dddd120be2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e3c405af272680faf36f228a48004ed3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ac33d51652b88802c5742ad77b198ed0 |
| publicationDate |
2010-11-01^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I332600-B |
| priorityDate |
2004-06-10^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |