| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31138
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31144
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76808
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02063 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3213
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate |
2007-12-10^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2012-01-11^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f5d665bd41f0077b9a7096ef836b9521
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9700d5fda14a161249a2b7383797e0cf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_71c2eea8d7283a422ebbb66d92f23c11 |
| publicationDate |
2012-01-11^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I356454-B |
| titleOfInvention |
Two step etching of a bottom anti-reflective coati |
| priorityDate |
2006-12-08^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |