| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_44ff3005508304394801e265e503b811 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-76
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-38 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C23-00 |
| filingDate |
2009-06-16^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2014-11-21^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5b0109a8582c900157be5aa9e9e464d9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2a0d8de14cf66d27ff0699dbcc83c009 |
| publicationDate |
2014-11-21^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I461829-B |
| titleOfInvention |
Method for manufacturing blank reticle with glass substrate, method for manufacturing blank reticle and method for manufacturing reticle |
| priorityDate |
2008-06-18^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |