| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_099413ae0cf5a2b6398b5151766cd260 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-458 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-124
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32134 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-28 |
| filingDate |
2010-05-13^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2015-04-11^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_da3b1efa357d893974838266446f7b3d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0df1811abe19c4b0dca2661078d597c2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4d01c18c426c993e7852d6fe9e7be81d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_28b86ba2586c3c394bc897bcdcfd4f3e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2ca58a459e958535a180108d7cac0c3d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_155e013371636616377cd0f0ca3e4bf8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3edffa384b15ef95547ac2e6ff9b60f1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6a712e43bd0de36dc403871ee53be60f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cd5994081b496756f7f6485a738f824a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_97c05daa02335116cabc80c66478d11f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_92de026a53d5599437a40145b9646e71 |
| publicationDate |
2015-04-11^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I480424-B |
| titleOfInvention |
Etchant and method for manufacturing array substrate using the same |
| priorityDate |
2009-05-14^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |